Low Acoustic Noise
Low acoustic type Environmental chamber can be used for Lithography process of Semiconductor process and Electric Microscope (SEM or TEM).
We control the acoustic noise inside of Chamber as well as temperature and humidity.
Temperature set range 18-25 deg C
Temperature stability +/-0.05 deg C or better
Acoustic noise Inside Enclosure 57dBA at Ambient noise 76dBA
ULPA Filter Efficiency 99.999995% with 0.1 - 0.2um.
Cleanliness ISO Class 1 Particle Level
Flow rate Air Flow rate 17cmm (600CFM)
Air Circulation 90cycle per hour
Main Body Heat Insulation Panels
HVAC Water cool